OKComputer posted this CNet link which discusses the opening of a new IBM chip plant in N.Y with plans on producing 90nm process chips in the near future:
IBM is manufacturing chips using the 130-nanometer process at the plant. The company plans to increase manufacturing quickly and reach full capacity early next year. It also plans a quick move to 90-nanometer production, which will reduce the size of the chips, allowing them to reach higher speeds and increase its manufacturing capacity yet again.
Motorola is planning on moving to the .13 micron process (from .18) as a next step in the life of the Apollo G4.